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强反射复杂表面随机缺陷检测照明系统分析 被引量:17

Illumination System for Detecting Random Defects on Strongly Reflective and Complex Surfaces
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摘要 分析了采用CCD光电检测法对强反射复杂表面随机缺陷进行检测时的光学照明问题。给出了缺陷显现力的具体定义。对比了平行光和均匀散射光对消除强反射光的不同作用及对不同表面缺陷的显现力。分析了使用均匀散射光作为光源时 ,工件表面照度对成像质量的影响。给出了在上述条件下光照系统设计的基本原则。 The illumination methods related closely to detect random defects on strongly reflective and complex surfaces with CCD detection are discussed. A concept of defect expressivity is developed and the dependency of image quality on luminance is illustrated in the condition of scattered light. Based on the comparisons between parallel light and uniform scattered light, it is concludes that uniform scattered light is much better than parallel light in reducing the mirror reflection and good at revealing the various surface defects. The design principles under those particular conditions are presented.
出处 《光学学报》 EI CAS CSCD 北大核心 2003年第5期547-551,共5页 Acta Optica Sinica
基金 高等学校博士科学点专项科研基金 ( 2 0 0 2 0 0 5 6 0 0 2 )资助课题。
关键词 图像处理 缺陷显现力 光电检测 照明系统 均匀散射光 成像质量 平行光 Charge coupled devices Defects Image processing Reflection Scattering Surface testing
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参考文献6

  • 1Wright P J, Rheinhorn S, Some D. Design and application of Gray Field/sup TM/ Technology for Defect Inspection Systems. Advanced Semiconductor Manufacturing Conference. 2001 IEEE/SEMI, 2001
  • 2Badger J C, Enright S T. Automate surface inspection system. Iron and Steel Engng. , 1996, (3):48-51
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  • 4刘诚,高淑梅.基于图像处理技术的数字散斑照相[J].光学学报,1999,19(10):1396-1400. 被引量:4
  • 5杜颖,张国雄,李真,杨颖.金属表面对光学非接触测头的影响[J].光电工程,2000,27(5):62-65. 被引量:4
  • 6Wang Qingyou. CUD Application (CUD 应用技术). Tianjin:Publishing Company of Tianjin University, 2000 (in Chinese)

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