含氟聚酰亚胺光波导120nm宽带耦合器的抗温度变动设计

Design of Temperature-Insensitivity for 120 nm Waveband Fluorinated Polyimide Waveguide Coupler

提出一种适合于宽带光波导耦合器的抗温度变动的优化设计理论和方法。使用该理论和方法 ,在 1490～16 10nm带域上 ,对含氟聚酰亚胺光波导做了宽带光波导 3dB耦合器的抗温度变动设计。器件经三维波束传播法模拟运行验证 ,结果表明 ,在 12 0nm带宽上 ,从零下 10℃至零上 40℃的温度变动中 ,器件实现了 ( 0 .5 0 0± 0 .0 0 7)功率输出比的良好特性。同时报道了含氟聚酰亚胺薄膜波导的制备工艺及其温度特性和色散特性的测试。

A statistical optimum design method suitable for temperature-insensitive waveguide coupler is proposed. Using the method, 120 nm waveband fluorinated polyimide waveguide 3 dB coupler is designed with the optimization of the temperature fluctuation. The design result is verified by the 3D-BPM simulation, and shows that the coupling ratio of (0.500 ± 0.007) in the waveband of 1490-1610 nm and temperature region of -10-40 °C is realized. The measuring method for refractive index dependence on temperature and for dispersion characteristic of the fluorinated polyimide film is also reported.