摘要
通过在光瞳面上取点的方法,找出被检平面镜面形误差与检验系统波像差之间的相互关系,即影响函数。利用最小二乘法求解一组过定线性方程组,求得被检平面镜的面形误差,拟合出被检平面面形。将其与干涉仪直接测得的面形相比较,发现两种方法得到的结果很接近。
The relation between form errors of the flat mirror under test and wave-front aberrations , i.e., influence function, can be obtained through sampling the pupil plane. A linear equation set can be solved by means of least square method, thus the form errors of the flat mirror under test can be obtained and the form of the flat mirror can be fitted. Compared with the form directly measured with interferometer, the results obtained with both methods are approximate.
出处
《光电工程》
CAS
CSCD
北大核心
2004年第1期23-25,31,共4页
Opto-Electronic Engineering
基金
国家高技术863课题资助
