摘要
光开关是光通信网络的重要功能器件,MEMS光开关是最具发展前景的光开关之一。在简介不同种类光开关原理特点的基础上,详细分析了当前主要的MEMS光开关的分类、结构、工艺与性能特点,并给出这一领域的研究与发展状况。
Optical switch is an important functional device in optical fibre communication networks,MEMS optical switch is one of the most promiseful optical switches. This paper introduces basic principles and characters of several kinds of optical switches,and illustrates the classification,structures,fabrication methods and functional characters of current MEMS optical switch in details. And recent development and progress on this research area are presented.
出处
《微纳电子技术》
CAS
2004年第2期32-37,共6页
Micronanoelectronic Technology
