MEMS隧道加速度计的系统分析与设计

System analysis and design of a MEMS tunneling accelerometer

主要论述了一种新型体硅工艺MEMS隧道加速度计的系统分析与设计 ,对加速度计敏感头与伺服反馈电路组成的系统进行系统建模 ,其中包含了结构的模型和反馈控制电路的模型。以系统模型作为基础 ,分析了器件工作所必须的条件 ,对器件的结构参数和反馈控制电路的参数进行了设计 ,并给出了系统的静态与动态输出。另外 ,本文提出了参数敏感度因子的概念及其计算方法 ,利用这种方法可以对每一个参数计算其对应的敏感因子 。

System analysis and design of a MEMS tunneling accelerometer are discussed in this paper. After proposing the structure and the circuit, their models are built. Based on the models the working point is analyzed, the parameters of the structure designed and the output curves of the system were calculated. In order to compare the sensitivity of different parameters, PSF (parameter sensitivity factor) and its calculation method were proposed and applied in the tunneling accelerometer.