叉指式微硅加速度计的参数化设计

Design of comb-driving micro-silicon accelerometers based on structure parameters

详细阐述了微硅加速度计的原理 ,根据材料力学以及结构动力学原理 ,分析了叉指式驱动 /检测结构的动力学模型 ,推导了等效质量、等效阻尼、等效刚度等关键参数模型 ,分析了灵敏度、横向干扰等和结构参数的关系 ,为微硅加速度计的优化设计与改进提供了理论指导 。

The principle of micro silicon accelerometers was investigated. Kinetic models of comb structures were built according to material mechanics and structural dynamics. Models of equivalent mass, equivalent stiffness and equivalent dump were deduced. Relations between sensitivity, cross disturbance and structure parameters were interpreted. These are helpful for the design and optimization of micro accelerometers.