摘要
阐述了一种主要由质量块、折叠梁结构、触点电极和自锁 /解锁机构组成的微型加速度开关的研制过程。设计过程中采用有限元软件Ansys进行结构模拟计算 ,确定了合适的结构参数 ;以硼硅玻璃为基底 ,采用准LIGA和牺牲层技术 ,分三层制作完成。经测试 ,开关性能较好 。
A kind of micro acceleration switch is presented in this paper. The switch is consisted of proof mass, tether beam, contact electrode and self lock/unlock components. General FEA (Finite Element Analysis) tools such as Ansys is used to calculate appropriate structure parameters in design. The switch is fabricated by three layer process with Pyrex base as well as UV LI GA and sacrifice layer technology. By testing a comparative good switching performance is achieved to meet the design requirements.
出处
《微纳电子技术》
CAS
2003年第7期312-313,316,共3页
Micronanoelectronic Technology
基金
武器装备预先研究基金资助项目 (2 0 0 2 42 10 5 0 3 5 0 3 )
