摘要
微型化、集成化可以使得传感系统减少体积、重量 ,降低成本 ,提高系统的可靠性 ,具有重要的科学意义。本文设计了一个用于测量大气湿度、温度和气压检测微型集成传感器。考虑到MEMS加工工艺兼容性 ,分别采用空气导热检测法、铂电阻法和电容法对湿度、温度、压力进行检测 ,并且进行了理论计算 ,设计了加工工艺步骤 。
Integrated sensor has the advantages of less weight, small size , low cost and high reliability. A design of integrated sensors for measuring humidity, temperature and pressure were described in the paper. Considering compatibility of MEMS processing, thermal conductivity method was used to measure humidity, and Pt resistance used to measure temperature, and capacitive sensor to measure pressure. The characteristics of the sensor have been calculated and simulated. The design and fabrication processing was introduced.
出处
《微纳电子技术》
CAS
2003年第7期583-585,589,共4页
Micronanoelectronic Technology
基金
中国科学院微系统创新项目资助
