微小机电强链中的驱动器

Driver applied in micro or small electromechanical stronglink

本文介绍了国内外研制成功的可用作微小机电强链驱动的几种微执行器 ,包括可实现的旋转和直线运动的静电式、电磁式、压电式微马达以及螺线管 ,详细阐述了其工作原理、机构特点 ,并对其优缺点进行了分析 ,同时提出一些改进方案和设计 。

Some kinds of actuators used as micro or small electromechanical stronglink drivers are intrduced, including electrostatic, electromagnetic, piezoelectric micromotor and solenoid. The principle, characteristic, advantage and disadvantage of these actuators are analyzed. At the same time, some improved schemes and designs are proposed as references for other micro or small electromechanical stronglink drivers.