3B1束线上LIGA掩模的设计研究

Design on X-ray masks for LIGA station in 3B1 beamline

BSRF中的 3B1光束线与LIGA实验站过去使用的 3W 1光束线相比 ,其同步辐射X光光谱较软、光强较弱 ,但可实现专用光和兼用光两用。现在LIGA实验站移到 3B1光束线 ,为此必须进行新的LIGA掩模设计、制作。结合此研究目的 ,本文通过使用XOP和Origin两个软件进行设计、计算 ,分别得到了专用和兼用时 3B1光束线在传输过程中的各级能谱图和传输、吸收数据 ,并针对这两种不同的用光情况分别设计、研究了两种不同组合的掩模 :Au PI组合和Au Si组合。

The X ray masks used in 3W1 beamline cannot be used in 3B1 beamline any more because the X ray spectrum is different from each other. So it is necessary to design and fabricate new masks for LIGA station in 3B1 beamline. In this paper, we figured out X ray spectrums during transmission course by computing with XOP and Origin software. We also designed and studied two kinds of different masks: Au PI masks and Au Si masks, respectively.