摘要
利用具有极高脉冲光强的飞秒激光器和对光束进行强聚焦的显微镜装置可以制造具有亚微米精度的三维微器件以及进行三维高密度信息存储。文本介绍了自行开发的双光子微细加工系统以及三维高密度信息存储系统 ,以及用该系统进行三维光学微细加工及三维光学信息存储的实验情况 。
By use of the femtosecond laser with extreme high pulse intensity and the microscope with high numerical aperture, it is possible to fabricate the three dimensional microdevice and to process three dimensional optical data storage. We made a complete introduction of the two photon 3D microfabrication system and optical data storage system which were built ty us, including the optical system, the corresponding software and the experiments. Based on the microfabrication system, several preliminary experimental results were given.
出处
《微纳电子技术》
CAS
2003年第7期173-176,共4页
Micronanoelectronic Technology
基金
自然科学基金 (5 0 2 75 14 0 )
中科院百人计划资助
关键词
双光子激光
三维微细加工
信息存储技术
飞秒激光器
电子器件
two photon excitation
femtosecond laser
three dimensional microfabrication
three dimensional optical data storage
