摘要
系统采用了显微干涉技术 ,利用Mirau显微干涉仪配合频闪照明系统实现了对MEMS器件动态特性的测量 ,测量过程采用了光学干涉的非接触方法 ,因此不会对器件产生损坏。系统采用了改进的相移算法 ,抑制了相移器误差以及探测器带来的非线性误差 ,提高了测量精度。利用本系统测量了微结构上多点处的振幅 。
Microscopic interferometry is applied in our system to measure dynamic behavior of MEMS devices, including a Mirau microscopic interferometer and a set of stroboscopic illumination system. Optical non contact method is used in our measuring process, so it doesn't damage the devices tested. A modified phase shifting algorithm is used in our testing system to improve the measurement accuracy, which decreases the errors from phase shifter and detector's nonlinearity. We have measured the amplitude of many dots on the mirco device, and gotten its resonant frequency.
出处
《微纳电子技术》
CAS
2003年第7期218-220,共3页
Micronanoelectronic Technology
基金
国家 8 63计划项目 (2 0 0 2AA40 40 90 )
