SU-8微针执行器的研究

Research of SU-8 photoresist micro-actuator

设计和采用MEMS工艺技术制作了一种由电磁驱动的微量取样执行器。执行器的结构包括微针、通道、反应室、电极以及永磁微阵列等。通过外部磁场可以实现双向线性驱动。本文主要介绍了利用SU 8光刻胶材料 ,采用多级曝光实现 3D结构的工艺技术 ,研制出了微针执行器的雏形器件。微针的尺寸为 6 0 0 μm× 80 0 μm× 4 0 μm ,微针孔径截面为 2 0 μm× 2 0 μm 。

A micro sampling actuator driven by electromagnetic force is designed and fabricated by MEMS technology. It includes microneedle, microchannal, reaction chamber, electrodes and permanent magnet array. It can be driven bidirectionally and linearly by the magnetic field outside. In this paper, the microneedle is introduced, which is made of SU 8 photoresist by multistep exposal and the rudiment of microneedle actuator has been developed. The size of microneedle is 600μm×800μm×40μm, and its aperture section is 20μm×20μm. The photograph of the structure is given by SEM.