摘要
介绍了压阻式传感器的温度补偿原理及补偿方法 ,详细阐述了硅压阻式加速度传感器 30 2 8的补偿方法 ,给出了实验数据。该补偿方法使用元器件少 ,补偿简单 。
The theory and method of temperature compensation of piezoresistance sensor are described in this paper with emphasis on the silicon piezoresistance acceleration sensor 3028. Experiment data are shown in it. The features of this kind of compensation method are using few components, easy compensation and powerful practicability.
出处
《微纳电子技术》
CAS
2003年第7期489-491,共3页
Micronanoelectronic Technology
