摘要
提出了一种压电致动的阵列微喷 ,以面向吸入式药物治疗应用。该阵列微喷工作在器件的谐振点上 ,其工作性能决定于液体腔中的压力波的分布和大小。本文针对该类微喷建立了考虑压电 固 液耦合和压力波传播效应的等效模型 ,并利用有限元方法对整个器件的结构振动模态和压力驻波模态进行了分析。文章对不同振动模态下 。
A piezoelectrically actuated micro array jet has been developed for the application of the inhalation drug therapy. The micro jet is resonance dependent and its operational quality is determined by the characteristics of the pressure wave in the liquid chamber of the micro jet. In this paper, an equivalent model for the micro jet is presented and it considers the coupling effect of piezo structure liquid and the transmission of the pressure wave. Finite element method is used to solve the model for the structural vibration mode and the pressure stand wave mode. The characteristics of the pressure wave at different vibration modes and its effect on the design of micro jet is discussed.
出处
《微纳电子技术》
CAS
2003年第7期506-511,共6页
Micronanoelectronic Technology
基金
973项目"集成微光机电系统"(G19990 3 3 10 6)
教育部重点项目资助
