摘要
射频MEMS开关是用MEMS技术形成的新的电路元件,与传统的半导体开关器件相比具有插入损耗低、隔离度大、线性度好等优点,将对现有雷达和通信中RF结构产生重大的影响。介绍了射频MEMS开关的工作原理、优化设计,分析了可靠性问题,举例说明了射频MEMS开关的应用,指出了其发展所面临的问题。
Radio-frequency(RF)micro-electro-mechanical systems (MEMS )switches are new class circuit components fabricated utilizing MEMS technology.Compared with solid state switches such as GaAs MESFETs and p-i-n diodes,RF MEMS switches have advantages including a low insertion loss,high electrical isolation,low intermodulation products and low consumption,and will provide a major impact on existing RF architectures in radar and communications.The opera-tion principle,optimum design and reliability analysis are presented,the applications of which are illustrated with examples.Challenges encountered of the development for RF MEMS switches technology are braught up.
出处
《微纳电子技术》
CAS
2003年第5期28-32,共5页
Micronanoelectronic Technology
基金
信息产业部微电子技术项目(41308050116)
