摘要
采用提拉法生长得到LGS单晶,采用磷酸作腐蚀剂,对LGS晶体做了一系列腐蚀实验。实验结果表明:对于不同方向晶面,腐蚀液的配比和腐蚀时间等条件各不相同。根据腐蚀坑可以判定,其极轴是二次轴[1120]方向,并可具体确定极轴方向。关于腐蚀坑的分布可以判定,在现行条件下生长的晶体具有较高的质量。
La3 Gas SiO14 crystal was grown by czochralski method. Chemical etching was carried out on the grown crystals by using H3PO4-based etchants. It was found that the proportion of etchants and the etching time varied with different facets of the sample.The pit shapes showed the two-fold [1120] axis of the crystal was the polar axis. The observation of the defects distribution revealed that the quality of the as grown LGS crystal was good.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2003年第2期184-186,共3页
Journal of Functional Materials
基金
国家基础研究发展规划基金资助项目(G1998061403)