基于积分分离数字PID控制的超精密定位系统的设计

The Design of Digital PID Control With Separated Integral for an Ultra-Precision Positioning System

作为精密加工工业的基础 ,超精密定位技术已经成为高精度加工的关键环节之一。本文设计了集位移数据采集、处理、控制于一体的超精密定位系统。在阐述了PID控制算法的一般原理基础上 ,采用了一种基于积分分离数字PID的控制算法 。

The technology of ultra-precision positioning is now become a key element of high precision machining.The paper introduces a ultra-precision positioning system which integrates the data acquisition of displacement、processing and controlling.Firstly,it presents the principle of normal PID.The system employs the algorithm of integral separation which realize the control of the ultra-precision positioning system.