摘要
氯气杂质的含量直接影响多晶硅的质量。本文将介绍气相色谱法在氯气纯度分析中的应用,一次性检测出氯气中多种杂质,在多晶硅生产质量控制中得到良好的应用。
the content of chlorine gas impurities directly affect the quality of polysilicon. This article introduces application of gas chromatography in the analysis of chlorine gas purity, one-time detection of chlorine gas in a variety of impurities, get good application in polysilicon production quality control.
出处
《中国标准化》
2016年第15期25-25,27,共2页
China Standardization
关键词
氯气
气相色谱
分析
chlorine gas
gas chromatography
analysis
