膜电解法再生FeCl_3蚀刻液的蚀刻性能研究

Performance of FeCl_3 Etching Solution Renewed by Ion-exchange Membrane Electrolysis

对某蚀刻厂的废蚀刻液通过膜电解工艺进行再生,并通过蚀刻性能条件实验研究了蚀刻时间、温度、蚀刻液浓度、蚀刻液游离酸含量等因素对蚀刻液(新蚀刻液、在线蚀刻液、再生蚀刻液)氧化还原电位和蚀刻速率的影响。结果表明,再生蚀刻液满足蚀刻要求,并且当蚀刻温度为50~60℃、蚀刻液浓度为再生蚀刻液浓度的90%、游离酸浓度为0.3 mol/L以上时,再生蚀刻液蚀刻速率最大。

In order to recycle the etching solution, the waste FeCl3etching solution of a plant was renewed by a process of ion- exchange membrane electrolysis. Then the performance of the renewed etching solution was evaluated in terms of the effect of etching time, temperature, concentration of the etching solution and the free acid content in the etching solution on the redox potential and the etching rate for etching solutions such as new etching solution, the online etching solution and renewed etching solution. The results showed that the renewed etching solution met the demands of the etching process. An optimal etching efficiency may be reached when the etchant contains 90% of the renewed etching solution and free acid concentration higher than 0.3 mol/L at etching temperatures within a range 50~60 ℃.