摘要
钛酸钡(BT)陶瓷膜是一种非常优异的电子陶瓷薄膜材料,在Si(100)基底上得到均匀无开裂的陶瓷薄膜是使其具有优异电性能的重要前提。采用溶胶凝胶法,运用先进的电子探针显微镜(SPM)之原子力显微镜(AFM)考察了干燥阶段不同陈化时间、干燥方法、退火温度、退火时间对钛酸钡陶瓷膜表面形貌的影响,找到了制备光滑均匀钛酸钡陶瓷薄膜的最佳干燥方法。
BaTiO3(BT)Ceramic Thin Films are excellent electronic ceramics materials, Preparation even without cracking Ceramic Films on the Si(100) substrate is an important prerequisite for excellent electrical properties.The influence of different aging time and drying methods on the morphology of the films by Sol-gel method was examined by advanced Atomic Force Microscopy(AFM)which is one microscopy of Scanning probe Microscope(SPM). The best drying method for preparing smooth Barium titanate Ceramic Thin Films was obtained.
出处
《中国陶瓷》
CAS
CSCD
北大核心
2014年第8期54-58,共5页
China Ceramics
基金
河北省教育厅青年基金课题(QN20131066)
关键词
钛酸钡
陶瓷膜
干燥方法
表面形貌
Barium titanate
Ceramic Thin Films
Drying method
Morphology
