Li,Mg共掺对ZnO薄膜的晶体结构和光学性能的影响

Crystal Structure and Optical Properties of ZnO Thin Films with Li,Mg Co-Doping

通过sol-gel旋涂法在抛光石英玻璃衬底上制备了不同Li,Mg掺杂浓度的ZnO薄膜,并使用XRD、SEM、UV-VIS等测试手段分析研究了不同Li,Mg掺杂浓度对ZnO薄膜微观结构和光学性能的影响。结果表明:Li,Mg掺杂后,薄膜仍保持六角纤锌矿结构,并有利于沿(002)方向择优生长,由SEM图可知随着Li,Mg的掺入,薄膜结晶质量、薄膜致密度、表面平整度以及薄膜晶粒均匀性有着明显的改善;在光学上,Li,Mg共掺对于薄膜透过率影响不明显,透过率均大于80%,并且Li,Mg共掺后使得薄膜禁带宽度增大。

The ZnO thin films with different Li, Mg doping mole ratio were synthesized on quartz glass substrate with sol-gel spin coating method. The effects of Li, Mg Co-doping on microstructure and optical properties were characterized by X-ray diffraction(XRD), scanning electron microscopy(SEM) and ultraviolet visible(UV-Vis). The results show that the films still remain hexagonal wurtzite-structured with c-axis preferred orientation growth after doped Li and Mg. The crystal quality,density,surface smoothness of the film and uniformity of the film grain has significantly improved as seem from the SEM photogragh. In optics, the transmittance of Li,Mg co-doped film has no obvious effect,all of the film transmittance greater than 80%,and Li,Mg co-doped film makes the band gap increases.