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1.8-kV circular AlGaN/GaN/AlGaN double-heterostructure high electron mobility transistor 被引量:2

1.8-kV circular AlGaN/GaN/AlGaN double-heterostructure high electron mobility transistor
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摘要 In this paper, we present a 1.8-kV circular AlGaN/GaN/AlGaN double-heterostructure high electron mobility transistor(DH HEMT) with a gate-drain spacing L_(GD)= 18.8 μm. Compared with the regular DH HEMT, our circular structure has a high average breakdown electric-field strength that increases from 0.42 MV/cm to 0.96 MV/cm. The power figure of meritV_(BR)~2/RON for the circular HEMT is as high as 1.03 ×10~9 V^2·Ω^(-1)·cm^(-2). The divergence of electric field lines at the gate edge and no edge effect account for the breakdown enhancement capability of the circular structure. Experiments and analysis indicate that the circular structure is an effective method to modulate the electric field. In this paper, we present a 1.8-kV circular AlGaN/GaN/AlGaN double-heterostructure high electron mobility transistor(DH HEMT) with a gate-drain spacing L_(GD)= 18.8 μm. Compared with the regular DH HEMT, our circular structure has a high average breakdown electric-field strength that increases from 0.42 MV/cm to 0.96 MV/cm. The power figure of meritV_(BR)~2/RON for the circular HEMT is as high as 1.03 ×10~9 V^2·Ω^(-1)·cm^(-2). The divergence of electric field lines at the gate edge and no edge effect account for the breakdown enhancement capability of the circular structure. Experiments and analysis indicate that the circular structure is an effective method to modulate the electric field.
作者 Sheng-Lei Zhao Zhi-Zhe Wang Da-Zheng Chen Mao-Jun Wang Yang Dai Xiao-Hua Ma Jin-Cheng Zhang Yue Hao 赵胜雷;王之哲;陈大正;王茂俊;戴扬;马晓华;张进成;郝跃(Key Laboratory for Wide Band-Gap Semiconductor Materials and Devices,School of Microelectronics,Xidian University;China Electronic Product Reliability and Environmental Testing Research Institute;Institute of Microelectronics,Peking University;School of Information Science and Technology,Northwest University)
出处 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第2期391-394,共4页 中国物理B(英文版)
基金 Project supported by the National Key Research and Development Program of China(Grant No.2016YFB0400100) the National Natural Science Foundation of China(Grant Nos.11435010,61474086,and 61804125) the Natural Science Basic Research Program of Shaanxi Province,China(Grant No.2016ZDJC-02)
关键词 AlGaN/GaN/AlGaN DH HEMTS CIRCULAR structure BREAKDOWN voltage AlGaN/GaN/AlGaN DH HEMTs circular structure breakdown voltage
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