线源金属原子蒸气发生装置的研制

Manufacture and Research of the Linear-source Metal Atom Evaporation Device

介绍了一套线源金属原子蒸气发生装置。该装置由以下几部分组成 :不锈钢真空蒸发腔体 ;真空获得系统 ;电子枪 ;坩埚 ;能产生均匀磁场的磁极及线圈 ;推拉式内置工作平台 ;循环水冷却系统 ;电源、测量仪器及控制电路。经安装、调试和试运行试验 ,性能良好 ,已达到原设计指标。真空度达到 3× 10 - 3Pa ,对钆金属材料 ,能产生熔池的表面面积为 2 2mm× 4mm。利用此装置可开展电子枪蒸发、离子引出等多项实验研究。

This paper reported a set of metal atom evaporation device of linear source. The device is composed of the following parts: stainless steel vacuum evaporation cavity, vacuum attaining system, electron gun, crucible, uniform magnetic field, push-and-pull inner worktable, water-cooling system, power supply, measure instrument and control circuit. The device has achieved its primary design targets by several test runs after installing and debugging. The vacuum degree is above 3 × 10-3 Pa. The superficial melt area reaches to 22 mm × 4 mm to gadolinium metallic material. Many experiments such as the evaporation by the electron gun, ions extraction can be carried out with this device.