双面型PSD的短脉冲激光照射位置测量

Measurement of Short-pulse Laser Irradiation Position of Double-sided PSD

为了实现双面型位置敏感探测器(Position Sensitive Detector,PSD)对短脉冲激光光斑的准确测量,根据PSD响应原理——Lucovsky方程,得出双面型PSD在短脉冲光照下传统计算量和实际照射位置的换算关系式。结合短脉冲信号变化快、响应线性度低等特点,提出了一种基于双面型PSD的短脉冲激光照射位置计算方法,并分析了该方法的使用条件。通过实验对该方法进行了验证,给出了实验数据拟合曲线和理想曲线的对比,结果表明:该计算方法具有较高的测量精度。

In order to achieve accurate measurement of short pulse laser spot by double-sided PSD(Position Sensitive Detector),according to the principle of PSD response-Lucovsky formula,the conversion relationship between the traditional calculation amount and the actual irradiation position of the double-sided PSD under short pulse illumination is obtained.Combined with the characteristics of fast change of short pulse signal and low linearity of response,a calculation method of short pulse laser irradiation position based on double-sided PSD is proposed,and the use conditions of the method are analyzed.The method is verified by experiments,and the comparison between the experimental data fitting curve and the ideal curve is given.The results show that the proposed method has high measurement accuracy.