磁控溅射制备Ti-O-N选择性太阳能吸收涂层

Magnetron Sputtering of Ti-O-N Selective Solar Absorbing Coating

太阳能集热器是太阳能热水器的核心部件,平板集热器可以作为建筑材料与建筑完美融合,满足城市对太阳能的利用与建筑一体化的要求.本论文用中频磁控溅射技术制备用于平板集热器的Ti-O-N选择性吸收涂层.用XRD、SEM及红外反射测试研究工艺参数对吸收涂层结晶质量、形貌及反射率的影响.设置镀膜过程中气压分别为0.8Pa、1.2Pa和2.0Pa而其他参数不变,制备出不同气压条件下的Ti-O-N选择性吸收涂层,通过分析样品的表面形貌及红外反射率来研究镀膜过程中气压对涂层质量的影响.实验表明,气压越低,所镀的薄膜颗粒越致密均匀,薄膜表面越光滑,薄膜的集热效率越高,即涂层的质量越好.

Abstracts:Solar collector is the core component of the solar water heater.China's vacuum tube collec-tor has the advantages of high efficiency and low price,however,has disadvantage of detrimental to the appearance of the building.China's flat-plate collector has shortcomings of backward technology and low efficiency,but it can be used as building material to build the perfect fusion,can meet the requirements of the city on the use of solar energy and building integrated.This paper is to study the production technolo-gy of the flat-plate collector Ti-O-N selective absorption coating.Doing three experiments by Medium Frequency Magnetron sputtering system,with coating process air pressure of 0.8 Pa,1.2 Pa and 2.0 Pa, while the other parameters unchanged,produce three Ti-O-N selective absorbing coating.How the air pressure affects the quality of the coating can be knew by analyzing the samples'surface morphology and in-frared reflectivity.The experiments show that with the decreasing of total gas pressure,the film particles became more compact and surface is more smooth,and therefore the higher the collection efficiency of the film,that is,the better the quality of the coating.