期刊文献+

纳米切削基础理论及相关关键技术研究 被引量:2

Fundamental Study and Progress of Nano Cutting
原文传递
导出
摘要 纳米制造是物理、化学、生物、材料、电子、机械等多学科的新型交叉领域,是支撑纳米科技成果走向应用的重要基础。作为纳米精度制造的重要手段,纳米切削是整个先进制造产业发展的核心技术之一。由于纳米切削过程的高速瞬态过程不易表征和材料原子级去除的机制不明确,在世界范围内还没有形成成熟的纳米切削理论,严重影响了纳米切削技术的发展。同时,由于其研究对象的特殊性。
出处 《中国科学基金》 CSSCI CSCD 北大核心 2014年第5期357-359,共3页 Bulletin of National Natural Science Foundation of China
基金 国家自然科学基金委员会重大研究计划重点项目支持(90923038)
关键词 纳米切削 切削机理 最薄切屑 粒子注入 微刀具 Nano cutting Cutting mechanism Minimum chip thickness Ion implantation NilM Micro tools
  • 相关文献

参考文献10

  • 1徐飞飞,张效栋,房丰洲.金刚石刀具单点切削单晶硅加工表面特性[J].纳米技术与精密工程,2013,11(6):485-491. 被引量:14
  • 2YUAN DanDan,ZHU PengZhe,FANG FengZhou,QIU Chen.Study of nanoscratching of polymers by using molecular dynamics simulations[J].Science China(Physics,Mechanics & Astronomy),2013,56(9):1760-1769. 被引量:4
  • 3Z. J. Li,F. Z. Fang,Hu Gong,X. D. Zhang.Review of diamond-cutting ferrous metals[J].The International Journal of Advanced Manufacturing Technology (-).2013(5-8)
  • 4F.Z. Fang,X.D. Zhang,A. Weckenmann,G.X. Zhang,C. Evans.Manufacturing and measurement of freeform optics[J].CIRP Annals - Manufacturing Technology.2013
  • 5Pengzhe Zhu,Yuanzhong Hu,Fengzhou Fang,Hui Wang.Multiscale simulations of nanoindentation and nanoscratch of single crystal copper[J].Applied Surface Science.2012(10)
  • 6M. Lai,X. Zhang,F. Fang.Study on critical rake angle in nanometric cutting[J].Applied Physics A.2012(4)
  • 7P. Zhu,F. Fang.Molecular dynamics simulations of nanoindentation of monocrystalline germanium[J].Applied Physics A.2012(2)
  • 8F.Z. Fang,Y.H. Chen,X.D. Zhang,X.T. Hu,G.X. Zhang.Nanometric cutting of single crystal silicon surfaces modified by ion implantation[J].CIRP Annals - Manufacturing Technology.2011(1)
  • 9Y.H. Chen,F.Z. Fang,Z.W. Xu,X.D. Zhang,X.T. Hu.Surface modification for brittle monocrystalline materials by MeV ions[J].Nuclear Inst and Methods in Physics Research B.2011
  • 10F.Z. Fang,H. Wu,W. Zhou,X.T. Hu.A study on mechanism of nano-cutting single crystal silicon[J].Journal of Materials Processing Tech.2006(1)

二级参考文献23

  • 1Fang F Z, Venkatesh V. Diamond cutting of silicon with nanometric finish [ J ]. CIRP Annals-Manufacturing Tech- nology, 1998, 47(1) : 45-49.
  • 2Fang F Z, Chen Y H, Zhang X D, et al. Nanometric cutting of single crystal silicon surfaces modified by ion implantation [J]. CIRP Annals-Manufacturing Technology, 2011, 60 (1) : 527-530.
  • 3Yah J, Asami T, Harada H, et al. Fundamental investiga- tion of subsurface damage in single crystalline silicon caused by diamond machining [ J ]. Precision Engineering, 2009, 33(4) : 378-386.
  • 4Zarudi I, Zhang L. Effect of ultraprecision grinding on the microstructural change in silicon monocrystals [ J]. Journal of Materials Processing Technology, 1998, 84 ( 1 ) : 149- 158.
  • 5Gogotsi Y, Zhou G, Ku S-S, et al. Raman microspectrosco- py analysis of pressure-induced metallization in scratching of silicon [J]. Semiconductor Science and Technology, 2001, 16(5) : 345.
  • 6Wu Y Q, Huang H, Zou J, et al. Nanoscratch-inducedphase transformation of monocrystalline Si [J]. Scripts Ma- terialia, 2010, 63(8): 847-850.
  • 7Khayyat M M, Banini G K, Hasko D G, et al. Raman mi- crescopy investigations of structural phase transformations in crystalline and amorphous silicon due to indentation with a Vickers diamond at room temperature and at 77 K [ J ]. Journal of Physics D: Applied Physics, 2003, 36 ( 11 ) : 1300.
  • 8Yan J, Asami T, Kuriyagawa T. Nondestructive measure- ment of maehining-indueed amorphous layers in single-crys- tal silicon by laser miero-Raman spectroscopy [ J ]. Preci- sion Engineering, 2008, 32(3) : 186-195.
  • 9Loecheh G, Cave N, Menendez J. Measuring the tensor na- ture of stress in silicon using polarized off-axis Raman spec- troscopy [ J ]. Applied Physics Letters, 1995, 66 ( 26 ) : 3639-3641.
  • 10Bonera E, Faneiulli M, Batehelder D N. Raman spectrosco- py for a mierometrie and tensorial analysis of stress in silicon [ J ]. Applied Physics Letters, 2002, 81 ( 18 ) : 3377-3379.

共引文献15

同被引文献26

引证文献2

二级引证文献14

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部