日立扫描电镜真空系统的维护

Maintenance and Troubleshooting of Vacuum System of Hitachi Scanning Electron Microscope

电镜真空体系对确保仪器正常运行和图片质量十分重要。本文介绍了日立扫描电镜的真空系统的组成及在运行中出现的故障和故障消除的方法,为实现扫描电镜的正常工作提供了有利保障。

The maintenance,operation and trouble-shooting of the vacuum system,installed in HITACHI scanning electron microscope,were addressed briefly in a thought provoking way.To begin with,the negative influence of the unstable vacuum on the image quality,service life of filament,cleanliness of electron optics and normal operation of SEM was discussed with specific examples.Second,the possible solutions to the common technical problems,including,but not limited to the no response of pneumatic valve,diffusion pump breakdown,abnormal oil temperature,starting failure of mechanical pump,and deterioration or contamination of cooling water,were suggested.And finally,when it comes to safe operation and regular maintenance of the vacuum system,some musts and must-nots were recommended.