柔性薄膜材料疲劳失效研究

Studies on fatigue failure of flexible thin film materials

本文从薄膜材料的选择、失效机理、机械性能测试方法和疲劳失效对电学参数影响等方面进行了综述。分析了拉伸、弯折对薄膜微观形貌的影响,以及微裂纹的萌生、扩展以及饱和三个阶段的主要特点。总结了薄膜材料、晶粒大小、薄膜厚度对薄膜疲劳寿命的作用,进而分析对薄膜电学参数的影响。对薄膜表面、沿厚度方向和界面处疲劳裂纹的可控性进行了展望,将数学模拟与薄膜疲劳实验现象要更好的结合起来,可提高二者的符合程度。

In this article, the selection of thin film materials, failure mechanism, mechanical properties test method and fatigue failure are reviewed. The influence of tensile bending on the microstructure of the film and the initiation, electrical properties,expansion and saturation of microcracks were analyzed. The effects of film material, grain size and film thickness on the fatigue life of thin film were summarized. On membrane surface, along the thickness direction and control of fatigue crack was discussed.It is shown that the future studies on mathematical modeling and film fatigue experiment need to be combined together for better results.