真空装置门体运动机构的故障树分析

FTA Analysis of Motion Mechanism for Vacuum Equipment Automatic Door

真空装置门体运动机构可靠性是影响真空装置可用性的关键因素,针对新型的真空装置门体运动机构,本文在故障模式分析的基础上,建立了运动机构故障树模型,进行最小割集分析,对故障树进行了定性和定量分析,发现门体运动机构的系统可靠性薄弱环节,对门体运动机构系统设计和加工提出相应优化改进建议。

The reliability of the motion mechanism for automatic door is the key factor for usability of vacuum equipment.Aiming at the motion mechanism for new type of automatic door,based on the FMEA,the failure tree model of motion mechanism was established and the minimal cut set was analyzed.The fault tree was analyzed qualitatively and quantitatively.The weak links affecting the system reliability were found out and the suggestions were proposed in this paper.