变间距光栅刻线密度测试系统的性能评价

Performance of a grating groove density measuring system by diffraction method

在国家同步辐射实验室二期工程光束线的建设中,建立了一套变间距光栅刻线密度的测试系统。该系统采用衍射测量法测量光栅间距的变化,可以对光栅长度为100 mm的平面和凹面光栅的刻线密度进行测量。样品测量结果表明,该系统的测量精度△N/N<2×10^(-4),满足光束线工程的要求,可以作为NSRL进口的变间距光栅的验收工具。

A grating groove spacing measurement system is established and checked by a sample grating. By detailed error analysis and error sources control, small spacing variation of either plane or concave grating can be determined with accuracy of ΔN/N=2×10^(-4). It is an efficient grating spacing measurement tool for the variable spacing grating as well as the constant spacing grating at NSRL.