等离子体在无机化学中的应用

Application of plasma in the inorganic chemistry

等离子体化学反应具有较高的收率和良好的选择性,已应用在金属表面处理、材料的表面改性、冶金、无机薄膜材料和超微粒子的制备、合成化学等领域并取得了卓越成效。

Plasma chemical reaction has relatively higher yield and better selectivity. It has been used in metal surface treatment, surface property modification, metallurgy, the preparation of inorganic film and ultramicrons, and synthetic chemistry with remarkable satisfactory results.