光刻机超精密工件台研究

RESEARCH ON ULTRA-PRECISION STAGES OF LITHOGRAPHY

针对步进扫描投影型光刻机超精密工件台开展研究熏所搭建的超精密气浮运动试验台采用气浮直线导轨支撑、直线电机驱动、直线光栅尺反馈组成大行程直线运动系统,其上叠加洛仑兹电机驱动的气浮微动台,提供对直线电机运动的精度补偿,由双频激光干涉仪提供粗、精动运动系统的超精密位置检测和反馈,两套直线运动系统可研究同步扫描运动,并可灵活地组成多种x-y超精密运动系统。介绍了基于该试验台进行的超精密运动控制试验研究。

Researches about ultra-precision stages of stepper and scanner lithography are introduced.In the ultra-precision motion control stage built for experiments,linear guide air bearing,linear motors and linear encodes are adopted to make up of two parallel linear coarse motion systems.Lorentz motors drive fine stages with air bearing folded on the coarse motion systems.The dual-frequency laser interferometer completes the ultra-precision position detection and feedback.The two linear motion systems can realize the research of the synchronism scan motion and compose manifold x-y ultra-precision motion systems.The ultra-precision motion tests based on the test-stage are introduced and the motion positioning preci-sion has realized12nm.