方便、廉价的高稳定微带电路铬薄膜电阻

A Convenient and Low Cost Chromium Thin Film Resistor for Microstrip Circuits

本文通过理论分析和实验获得了蒸发低电阻温度系数铬薄膜电阻的最佳工艺。文章认为在微带电路中用铬薄膜电阻取代钽膜电阻,具有工艺简单、重复性好等优点,这不仅节约了贵重材料,缩短了工艺流程,而且阻值范围宽,应用范围更广。因此,对微带电路中薄膜电阻的生产来说是一项有意义的改革。

The optimum technique for depositing low TCR Chromium thin film resistors are discussed by analysis and experiments.The Cr thin film resistors has the advantages of si ple technology and repeatabili- ty.It not only saves high cost materials and reduces the processing period but als ends the range of the re- sistance and its applications.It is a significant improvement for manufacture of thin resistors which are used in microstrip circuits.