微纳晶体谐振器封盖移载机械手末端位置误差分析

Error Analysis of End Position of Micro-nano Crystal Resonator Cover and Transfer Manipulator

封盖移载机械手是一种移载微纳晶体谐振器封盖的装置,该装置要求其定位精度高、移载速度快。通过DH模型法,建立封盖移载机械手运动模型;基于MDH方法修正运动学模型并建立正运动学模型;利用Robotic Toolbox仿真验证运动建模的合理性;基于MDH建模方法建立统一的位置误差数学模型,得到各参数的误差对应末端位置坐标,为封盖移载机械手的安装、精度设计和误差分析提供理论依据。

The cover transfer robot is a device for transferring the cover of micro-nano crystal resonator.It requires high positioning accuracy and fast transferring speed.In this paper,the DH(Denvit-Hartenberg)model method is adopted to modelling the movement of the capping transfer manipulator.Positive kinematic model is established and modified using Denvit-Hartenberg method.The Robotic Toolbox simulation is used to verify the rationality of the motion modeling.Based on the MDH modeling method,a unified mathematical model to determine the position error is established.The error of each parameter corresponding to the end spatial coordinates are obtained,therefore providing a theoretical basis for the installation,precision design,and error analysis of the capping transfer manipulator.