扫描探针显微镜在粗糙度、纳米尺寸、表面形貌观测方面的应用

The Application of Scanning Probe Microscope (SPM) in Observing and Determining in the Roughness,Nano-scaled Size and Surface Topography

扫描探针显微镜是近十几年来在表面特征表面形貌观测方面最重大的进展之一 ,是纳米测量学的基本工具 ,本文叙述了扫描探针显微镜的工作原理、检测模式及在观察检测纳米级的粗糙度、微小尺寸、表面形貌方面的特点和方法 ,比较了原子力显微镜、常规的表面轮廓仪、干涉显微镜、扫描电子显微镜在表面特性、表面形貌观测方面的性能 ,着重介绍了扫描探针显微镜在这方面的应用和存在的问题。

The scanning probe microscope is one of the most important developments on observing and determining surface topography and surface properties in near ten years and is the basic tool of nano measurement.The principles,measuring modes,features and determination methods for observing and determining the roughness, nano scaled size and surface topography by SPM are described. The properties on observing and determining surface topography and surface properties by an atomic force microscope, a stylus type roughness gauge, an interferometer and a scanning electron microscope are compared. The application and present problems of SPM in observing and determining the nanometer scale roughness, small size and surface topography are particularly introduced.