氢敏元件的种类及半导体薄膜材料在其中的应用

Hydrogen sensors and semiconductor thin films in this field

随着氢燃料电池技术在汽车应用中的日益完善,对高性能氢敏元件的需求也更加迫切。本文介绍了采用不同工作原理制备的氢敏元件的种类,着重描述了半导体薄膜材料的工作原理和改性途径,并针对我国目前研究较少的Ga2O3新型薄膜材料进行了较为详细的综合论述。

With the coming use of hydrogen-driven vehicles, a highly sensitive and selective hydrogen sensor was required aiming at application like fire warning or leakage-control system. Classifications and principles of H_2 sensor were described in this paper. The mechanism of thin film hydrogen sensors was introduced thoroughly. After that the research and development of semiconductor thin film, including Ga_2O_3 new material used in hydrogen sensor were proposed.