期刊文献+

用于大气环境中的氮等离子体枪放电特性及束流强度

Discharge Characteristics and Jet Intensity of Nitrogen Plasma Gun in Atmosphere
下载PDF
导出
摘要 为将等离子体用于材料表面局部处理的研究,对自行设计的一种用于大气环境中的辉光放电氮等离子体枪的放电特性和束流强度进行了实验测量和理论分析,得出了放电伏安特性曲线和气流量对枪炬工作电压电流的影响,分析了其原因,并给出了拟合解析方程式,发现工作电压和工作电流分别与气流量成e 指数增长和e 指数衰减关系;同时得出了该等离子体枪束流先膨胀后收缩特征分布,在束流喷出5mm处达到最大作用面积,找到了得到最佳强度气流量值0 2m3/h,给出了有关的机理分析,进而得出制备样品的最佳条件· Aiming at local treatment of material surface by plasma, a glow discharge N_2 plasma gun to be used in atmosphere was designed to investigate and analyze theoretically its discharge characteristics and jet intensity. As experimental results, the discharging volt-ampere characteristic curve and effect of jet flux on torch's working voltage/current were discussed on their causes, with an analytic curve-fitting equation given. It was found that the working voltage and current is exponentially increasing and decreasing in relation to jet flux, respectively. Furthermore, the jet from the plasma gun is characterized by expanding first then contracting, with a maximum active sectional area found 5 mm distant from torch tip. The optimal intensity gas jet is 02 m^3/h. The operation mechanism of the plasma gun was thus discussed further to find out the optimal conditions on which the specimen preparation will be available.
机构地区 东北大学理学院
出处 《东北大学学报(自然科学版)》 EI CAS CSCD 北大核心 2004年第2期201-204,共4页 Journal of Northeastern University(Natural Science)
基金 国家自然科学基金资助项目(59974010 50174020)
关键词 辉光放电 等离子体枪 伏安特性 束流强度 放电特性 束型 glow discharge plasma gun volt-ampere characteristic jet intensity discharge torch shape
  • 相关文献

参考文献11

  • 1Kanazawa S, Kogoma M, Moriwaki T, et al. Glow plasma treatment at atmospheric pressure for surface modification and film deposition[J]. Nucl Instrum Methods Phys Res B, 1989,37:842-845.
  • 2胡海天,邬钦崇.微波等离子体源在钢表面氮化中的应用[J].材料保护,1996,29(2):28-30. 被引量:3
  • 3Sawada Y, Tamaru H, Kogoma M, et al. The reduction of copper oxide thin films with hydrogen plasma generated by an atmospheric-pressure glow discharge [J]. J Phys D, 1996,29:2539-2542.
  • 4Kogoma M,Okazaki S. Raising of ozone formation efficiency in a homogeneous glow discharge plasma at atmospheric pressure[J]. J Phys D, 1994,24:1985-1989.
  • 5陈小华,吴国涛,邓福铭,王健雄,杨杭生,王淼,卢筱楠,彭景翠,李文铸.射频等离子体辅助化学气相沉积方法生长碳纳米洋葱[J].物理学报,2001,50(7):1264-1267. 被引量:2
  • 6Mangolini L, Orlov K, Kortshagen U, et al. Radial structure of a low-frequency atmospheric-pressure glow discharge in helium[J]. Appl Phys Lett, 2002,80:1722-1724.
  • 7Yokoyama T, Kogoma M, Kanazawa S, et al. The improvement of the atmospheric-pressure glow plasma method and the deposition of organic films[J]. J Phys D, 1990,23:374-377.
  • 8Bai K H, Lee D S, Chang H Y. Control and analysis of ion species in N2 inductively coupled plasma with inert gas mixing[J]. Appl Phys Lett, 2002,80:3907-3909.
  • 9Bai K H,Chang H Y. Electron temperature analysis of two-gas-species inductively coupled plasma[J]. Appl Phys Lett, 2001,79:1596 -1597.
  • 10Wang Y C,Olthoff J K. Ion energy distributions in inductively coupled radio-frequency discharges in argon nitrogen oxygen chlorine and their mixtures[J]. J Appl Phys, 1999,85:6358-6365.

二级参考文献3

  • 1杨修春,物理学报,1998年,47卷,1052页
  • 2Kang Z C,Pilosophical Magazine.B,1996年,73卷,905页
  • 3Sacco A,J Catal,1984年,85卷,224页

共引文献3

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部