摘要
针对离轴TMA结构空间相机中使用的两块离轴非球面反射镜的加工过程,提出了一种新型的矩形离轴非球面的最接近球面半径的求解及其优化方法,并且开发了基于计算机虚拟加工技术的CCOS工艺参数计算方法。被加工工件分别为165mm×100mm的矩形凸面离轴非球面和770mm×200mm的矩形轻量化凹面离轴非球面,设计精度分别为任意100mm,200mm子孔径面形精度优于0.025λRMS(λ=632.8nm)。经检验,工件的加工精度满足了设计要求,分别达到了0.023λRMS和0.013λRMS。
A new way of solving and optimizing a best-fit sphere is proposed for surfacing and testing of two off-axis mirrors. A virtual fabrication program was developed for determination of CCOS CNC process parameters. The two off-axis aspheric mirrors surfaced are a convex mirror with an aperture of 165 mm×100 mm and a lightweighted concave mirror with an aperture of 770 mm×200 mm, and the design accuracies required for these two off-axis mirrors are better than 0.025 λ RMS with λ=632.8 nm over any 100 nm or 200 nm diameter sub-aperture. Inspections showed that the finish accuracies of convex and concave mirrors satisfied the design requirements, and they reached 0.023 λ RMS and 0.013 λ RMS respectively.
出处
《光学精密工程》
EI
CAS
CSCD
2004年第1期113-117,共5页
Optics and Precision Engineering
基金
国家杰出青年基金(No.69925512)
