基于PZT的微驱动定位系统及控制方法的研究

Micro-drive positioning system based on PZT and its control

介绍了基于PZT驱动的一维微动工作台。该微动台采用柔性平行板铰链机构,对其进行了出力和位移关系的分析,并且进行了ANSYS的有限元分析设计,求得了系统的固有频率和最大位移。其理论分析、有限元计算和试验测试结果的对比分析的一致性说明了理论分析的正确性和数值分析的可靠性。使用精密光栅进行微位移闭环检测,使用哈工大博实精密测控公司研制的压电陶瓷驱动电源。采用单神经元自适应PID控制算法对系统进行控制,单神经元具有自学习和自适应能力,而且结构简单易于计算;而传统的PID调节器也具有结构简单、调整方便和参数整定与工程指标联系密切等特点。推导了单神经元自适应PID控制器,并进行了实验,微位移为20μm时的响应时间为12ms,实验证明了该方法的有效性。

An ID micro-drive table actuated by PZT, which has a parallel board framework, is described in detail, and the relationship between its thrust force and displacement is analyzed and validated with ANSYS simulation and experimental results. The system is controlled by a neuron adaptive PID controller, which features self-learning and adaptability, and easy calculation for simple structure, and the experiments made with the neuron adaptive PID controller indicate that the method proposed is effective, and the response time for a micro displacement of 20 μm is 12 ms.