基于专家系统技术的MEMS虚拟工艺库

An Expert System Based Virtual Process System for MEMS

虚拟工艺是MEMS器件计算机辅助设计中对工艺过程仿真的部分 ,根据版图设计、层定义和工艺文件来生成器件模型 ,并进行三维模型显示 .本文在虚拟工艺库中引入了专家系统的技术 ,将已有的工艺知识分别描述成专家系统知识库中的规则 ,推理机部分与知识库分离 ,使系统有较好的可扩充性 .本文给出了一个剖面图的实例 ,证明其可行性 .

Virtual process is one part of rapid prototype manufacturing, which emulates process and displays 3D visualization, based on design of layout, definition of layer and process file. This paper introduces the technology of ES(expert system) that abstracts the existing knowledge into rules. The inference engine is separated from the repository, so it is easier to extend the system. At the end, an actual example is given to show the feasibility of this method.