ICF分解实验中的平面调制靶和薄膜靶的研制

Development of Surface Perturbation Target and Thin Silicon Foil Target Used to Research Rayleigh-Taylor Instability in Inertial Confinement Fusion Experiment

本工作研制了用于惯性约束聚变ICF分解实验模拟聚变靶丸表面粗糙度和驱动激光空间不均匀性对R T不稳定性作用的平面调制靶和平面薄膜靶。以激光干涉法结合图形转移工艺获得波长20～100μm、振幅0 0～4 0μm的正弦调制图形的模板,再将调制图形转移至溴代聚苯乙烯薄膜表面,制备出ICF实验用溴代聚苯乙烯平面调制箔靶;以半导体工艺结合自截止腐蚀工艺制得厚度4μm左右的自支撑Si平面薄膜靶。Si膜的表面粗糙度为几十纳米。对所研制的两种靶型的参数进行了测量。

The development of the surface perturbation target and the thin silicon foil target used to research Rayleigh-Taylor instability in the resolved experiments of inertial confinement fusion are carried out. Based on the laser interference process combined with the figure-transfer process, the surface perturbation target with sine modulated perturbation is gotten, and the wavelength is 20-100 μm while the amplitude is several micrometers. The thin silicon foil with the thickness about 3-4 μm is prepared by semiconductor process together with heavy-doped self-stop etching. Combined with ion beam etching, the check or the stripe patterns are transferred to the surface of thin silicon foils, and then the silicon grating foil is obtained.