摘要
采用超声喷雾热分解法沉积高性能掺氟二氧化锡(SnO2:F)透明导电膜(TCO),其最小方块电阻为9 Ω(400 nm厚),可见光透过率大于80%。X射线衍射(XRD)分析表明,SnO2:F薄膜为多晶结构;原子力显微镜(AFM)观察表明,SnO2:F薄膜平均粒径约为100 nm。此外对石墨导热体和置于其上的玻璃基片两者之间的温度差别做了初步研究。
High quality SnO2:F transparent conducting thin films were deposited by ultrasonic spray pyrolysis with the minimum sheet resistance of 9 Ω (thickness: 400 nm) and a visible-light transmittance of more than 80%. XRD analysis and atomic force microscope(AFM) observation indicate that SnO2:F thin films are polycrystalline structure with the average particle size of 100 nm. The temperature difference between the thermal conductor and the glass substrate was also studied.
出处
《电源技术》
CAS
CSCD
北大核心
2004年第2期97-100,共4页
Chinese Journal of Power Sources
基金
上海市科委资助项目(0152 nm 005)
