摘要
设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。通过有限元法(FEM)对传感器建模,并对其进行静力、模态和谐响应分析。模拟分析结果表明此传感器机械灵敏度可达1.81×10-7m/Pa,其频带宽度接近10kHz。
A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper. The structure features of the sensor were simulated, and its static, modal and harmonic response analysis of the sensor were implemented, using finite-element method (FEM). The sensitivity of the micro-acoustic sensor is up to 0.222×10^(-6) m/Pa, and its frequency band is about 10 kHz.
出处
《压电与声光》
CSCD
北大核心
2004年第1期31-34,共4页
Piezoelectrics & Acoustooptics
