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微电子机械系统尺寸效应的泛函分析 被引量:3

Functional analysis on dimension effect of micro-electromechanical system
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摘要 尺寸效应涉及微电子机械系统研究领域的各个方面 ,在分析归纳微器件或系统中尺寸对其特性影响的基础上 ,提出从纯尺寸因素和非尺寸因素综合考虑尺寸效应 ,建立了一个尺寸效应的基本数学模型 ,并从尺寸泛函的绝对值、相对值和对尺寸的灵敏度三个方面对该数学模型进行泛函分析 。 Dimension effect deals with every respects of research field of micro-electromechanical system. On the bases of analyzing and summing up the influence of dimensions in micro-devices or systems upon their characteristics, a synthetic consideration upon dimension effect from the respects of pure dimensional factors and non-dimensional factors has been put forward. A basic mathematic model of dimension effect was established, and a functional analysis upon this mathematical model from three aspects of absolute value, relative value of dimensional function and sensitivity of dimension was carried out. The regularity of occurrence for a number of dimension effect was summarized.
出处 《机械设计》 CSCD 北大核心 2004年第2期17-19,共3页 Journal of Machine Design
基金 国家自然科学基金资助项目 (50 1 350 4 0 )
关键词 微电子机械系统 尺寸效应 泛函分析 灵敏度 微器件 micro-electromechanical system (MEMS) dimension effect functional analysis sensitivity micro-device
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