大口径平面光学元件超精密加工技术的研究

Study on the technology of the ultra precision machining for the large-aperture optical flats

为了解决激光核聚变装置中大口径平面光学元件的批量制造难题,将先进制造技术和传统抛光技术相结合,提出了一种新的工艺方法,即使用ELID(在线电解)磨削代替传统的铣磨和初抛工序,以提高生产效率。利用数控抛光将工件抛光至最终的面形精度,以提高生产效率和减少边缘效应。将连续抛光作为最终加工工序,使加工工件的表面粗糙度和波纹度达到工程要求。实验证明这一新的工艺方法是可行的。

To solve the batch fabrication problems of the large-aperture optical flats in laser nuclear fusion, a new technological process is presented by combining the advance manufacturing technology and the traditional polishing technology. The ELID grinding is substituted for the milling and primary polishing process to increase the production efficiency. The optics is polished to the finial accuracy by the computer-controlled machine to increase the production efficiency and decrease the edge effect. The continuous polishing process is as the final process which the surface roughness and waviness of the optics satisfy the engineering requirement. The experiments show that the new technological process is practicable.