基于点测量法的非定步长相移恢复算法

Algorithm of Undecided Steps Phase-shift Based on the Single Point Measuring

提出了一种新的计算光栅相移量点测量法。利用该方法可精确地计算出光栅相移量,精度达到1nm。该方法抛弃了非定步长算法中利用傅立叶变换获取光栅相移量的方式,使非定步长相移算法在三维曲面形貌测量中的应用进一步趋向完善。

A new method of the single point measuring to calculate the grating phase-shift phase was proposed. This method can calculate the grating phase-shift phase accurately. The precision is up to 1 nm. This method abandons that it uses the Fourier translation to get the grating phase-shift phase in the undecided step algorithm. Also, it makes the undecided step algorithm tend to perfect ulteriorly.