摘要
基于X射线衍射与吸收理论,提出一种薄膜厚度测量方法即膜下基体衍射法。利用X射线应力仪测量高速钢表面的TiN薄膜厚度,发现利用膜下基体衍射可精确测量薄膜厚度。
Based on the theory of X-ray diffraction and absorption, a method for measuring the thickness of film material according to the diffraction intensity of the matrix below film was established. The thickness of the TiN film on high-speed steel was measured by X-ray analyzer. It was found that the film thickness could be measured accurately by using the method.
出处
《无损检测》
2004年第2期74-76,共3页
Nondestructive Testing
