摘要
对基于MEMS微加工工艺的微致冷器件和微发电器件的最新研究情况进行了综述,对各种结构形式和研究现状进行了综合比较。从微热电器件的优化设计方法、微机械加工工艺等方面,分析了提高微热电器件性能的途径。
The latest development of thermoelectric microdevices,such as microcooler and microgenerator,is presented in the paper.Also, a detailed comparison of various structures developed by different research institutes is dealt with.Approaches to improving the performance of thermoelectric microdevices are analyzed,with regard to design optimization techniques and MEMS technology for the device.
出处
《微电子学》
CAS
CSCD
北大核心
2004年第1期7-12,17,共7页
Microelectronics
