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电光检测技术空间分辨率的研究与进展 被引量：1

Progress in the Research of Spatial Resolution of Electro-Optic Measuring Techniques
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摘要 　概述了电光检测技术空间分辨率的发展。为适应集成电路工艺水平的提高,电光检测技术必须提高空间分辨率和电压灵敏度。介绍了近年来开展的提高空间分辨率到亚微米量级的研究,提出了未来空间分辨率进一步提高的设想。 Progress in the research of spatial resolution of electro-optic measuring techniques is summarized.In order to follow the advancement of the IC process,the spatial resolution and voltage sensitivity of electro-optic measuring techniques should be improved.Recent researches on the improvement of the spatial resolution in sub-microns are described,and possible solutions to be adopted in the future for improvement of the spatial resolution are proposed.
作者 李海兰 陈占国 贾刚 张晓婷 李延臣
机构地区 吉林大学电子科学与工程学院 长春理工大学
出处 《微电子学》 CAS CSCD 北大核心 2004年第1期18-20,25,共4页 Microelectronics
基金 国家自然科学基金资助项目(69676025) 国家自然科学基金资助项目(69976013)
关键词 电光检测技术 空间分辨率 集成电路测试 入射光波长 数值孔径 Electro-optic measurement Spatial resolution IC test
分类号 TN407 [电子电信—微电子学与固体电子学]
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参考文献12

  • 1[1]Dykaar D R,Kopf R F,Keil U D,et al.Electro-optic sampling using an aluminum gallium arsenide probe [J].Appl Phys Lett,1993;62(15):1733-1735.
  • 2[2]Nagatsuma T,Shibnta T,Sano E,et al.Subpicosecond sampling using a noncontact electrooptic probe [J].J Appl Phys,1989; 66 (9):4000-4009.
  • 3[3]Taylor A J,Wiesenfeld J M,Eisenstein G,et al.EleO ctro-optic sampling of fast electrical signals using an InGaAsP injection laser [J].Electron Lett,1986; 22(1):61-62.
  • 4[4]Valdmanis J A,Mourou G,Gabel C W.Picosecond electro-optic sampling system [J].Appl Phys Lett,1982;41(3) :211-212.
  • 5[5]Angelov L A,Kravchenko L N,Sagiyan G M.Determination of the two-dimensional distribution of potentials in integrated circuits by the laser scanning method [J].Sov J Quantum Electron,1988; 18(8):1044-1046.
  • 6[6]Wiesenfeld J M,Tucker R S,Antreasyan A,et al.Electrooptic sampling measurement of high-speed InP integrated circuits [J].Appl Phys Lett,1987;50(19):1310-1312.
  • 7[7]Chen Q,Zhang X-C.Polarization modulation in optoelectronic generation and detection of Terahertz beams [J].Appl Phys Lett,1999 ; 74 (23) :3435-3438.
  • 8[8]David G,Bussek P,Auer U,et al.Electro-optic probing of RF signals in submicrometre MMIC devices [J].Electro Lett ,1995;31(25) :2188-2189.
  • 9[9]Zhang H-B,Wang R,Chen K-X.Research of spatial reso-lution in external electro-optic probing [J].Optics and Laser Technology,2002; 34:283-286.
  • 10[10]Chen Z-G,Jia G,Yi M-B,et al.External electro-optic measuring system with high spatial resolution and high voltage sensitivity by using an electro-optic solid immersion probe [J].J Phys D:Applied Physics,2001 ; 34(20):3078-3082.

同被引文献23

  • 1VALDMANIS J A, MOUROU G, GABEL C W. Picosecond electro-optic sampling system [J] . Appl Phys Lett, 1982, 41 (3): 211-212.
  • 2NAGATSUMA T. Measurement of high-speed devices and integrated circuits using electro-optic sampling technique [J] . IE ICE Trans Electron, 1993, E76-C (1): 55-63.
  • 3KOLNER B H, BLOOM D M. Direct electronic-optic sampling of transmission-line signals propagating on a GaAs substrate [J] . Electron Lett, 1984, 20 (20): 818-819.
  • 4VALDMANIS J A. 1 THz-bandwidth prober for high-speed devices and intefrated circuits [J] . Electron Lett, 1987, 23 (24): 1308-1310.
  • 5VALDMANIS J A, MOUROU G. Subpicosecond electrooptic sampling: Principles and applications [ J] . IEEE Jounal of Quantum Electronics, 1986, QE-22 (1): 69-79.
  • 6LIONEL D, STEPHANG R, JEAN-LOUISC, et al. Electrooptic sensors for electric field measurements. Ⅱ. Choice of the crystals and complete optimization of their orientation [J] . J Opt Soc Am B, 2002, 19 (11): 2704-2715.
  • 7ULRICH D R. NLO polymer systems and devices [J] . Mol Cryst Liq Cryst, 1988, 160: 1-31.
  • 8CHEN D, FETTERMAN H R, CHEN A, et al. Demonstration of 110 GHz electro-optic polymer modulators [J] . Appl Phys Lett, 1997, 70 (25): 3335-3337.
  • 9THAKUR M, XU J, BHOWMIK A, et al. Single-pass thinfilm electro-optic modulator based on an organic molecular salt [J] . Appl Phys Lett, 1999, 74 (5): 635-637.
  • 10ZHENG X, WU S, SOBOLEWSKI R, et al. Electro-optic sampling system with a single-crystal DAST sensor [J] . Appl Phys Lett, 2003, 82 (15): 2383-2385.

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微电子学
2004年 第1期

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